Kashiyama

Air-Cooled, Reduced Foot Print, Dry Vacuum Pump, The Lowest CoO, Competitively Priced

• Simple Hookup – Does not require Water or N2
• Lowest CoO Among Comparable Pumps
• Maintenance Free – Non Contact Internal Components
• Applicable for Water Vapor Pumping

The world smallest and least power consumption.
The pump can be integrated into any equipment easily.

• Kashiyama ultimate space save design has realized the pumping speed of 1660l/min with the small foot print 230 mm x 450 mm.
• The MU series are perfect for load locks, clean exhaust for transfer rooms and light process application of semiconductor manufacturing.

Dry pumps reliable for all applications.
Energy-saving feature combined with the reliability, SDE Series achieved lower running cost.

• Advanced screw technology allows longer life operation under hard applications.
• Anti-corrosion material construction allows pumping of corrosive gasses.
• The unique screw design and driving system realized 40% reduction in energy consumption, compared to conventional models.

Higher pumping speed.
Support larger dilameter wafer, larger FPD substrate and Solar applications.
Higher pumping speed minimizes the tact time for large load lock chamber.

• Maximized the pumping speed in the atmospheric side to achieve higher throughput.
• The combination with large booster pump allows higher pumping speed up to 55,000L/min.

Can be used in combination with the dry pumps to enhance pumping capacity.
Rotational speed control enables operation from atmospheric pressure.

• High efficiency motor and driving system realized significant downsize compare to conventional models.
• Canned motor is adapted to improve reliability.
• Improvements of the driving system and mechanical efficiency allow minimizing the power.
• Rotation speed control achieves continuous operation under the atmospheric pressure.
• Synchronous motor enables consistent pumping performance at any power supply frequency. (03 series)